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Differential laser interferometer for nanometer displacement measurements

โœ Scribed by Lee, C.-K.; Wu, T. -W.

Book ID
115502527
Publisher
American Institute of Aeronautics and Astronautics
Year
1995
Tongue
English
Weight
913 KB
Volume
33
Category
Article
ISSN
0001-1452

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๐Ÿ“œ SIMILAR VOLUMES

Laser diode interferometer used for meas
Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy
โœ Xuefeng Wang; Xiangzhao Wang; Hongbin Lu; Feng Qian; Yang Bu ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 130 KB

In this paper, the displacement of an object is measured with a photothermal phase-modulating laser diode interferometer. A feedback control system is designed to reduce the measurement errors caused by the uctuations in the optical wavelength of the laser diode and the vibrations of the optical com