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A laser-interferometer measuring displacement with nanometer resolution

✍ Scribed by Zagar, B.G.


Book ID
114542875
Publisher
IEEE
Year
1994
Tongue
English
Weight
544 KB
Volume
43
Category
Article
ISSN
0018-9456

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✍ Xuefeng Wang; Xiangzhao Wang; Hongbin Lu; Feng Qian; Yang Bu πŸ“‚ Article πŸ“… 2001 πŸ› Elsevier Science 🌐 English βš– 130 KB

In this paper, the displacement of an object is measured with a photothermal phase-modulating laser diode interferometer. A feedback control system is designed to reduce the measurement errors caused by the uctuations in the optical wavelength of the laser diode and the vibrations of the optical com