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Development of a laser synthetic wavelength interferometer for large displacement measurement with nanometer accuracy

✍ Scribed by Chen, Benyong; Yan, Liping; Yao, Xiguo; Yang, Tao; Li, Dacheng; Dong, Wenjun; Li, Chaorong; Tang, Weihua

Book ID: 115412775
Publisher: Optical Society of America
Year: 2010
Tongue: English
Weight: 266 KB
Volume: 18
Category: Article
ISSN: 1094-4087
DOI: 10.1364/OE.18.003000

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