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Different luminescent properties of C+-implanted SiO2 films grown by thermal oxidation and PECVD

✍ Scribed by J. Zhao; D.S. Mao; Z.X. Lin; B.Y. Jiang; Y.H. Yu; X.H. Liu; G.Q. Yang


Book ID
117358647
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
140 KB
Volume
38
Category
Article
ISSN
0167-577X

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