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Dielectric properties of vacuum deposited Samarium Oxide sandwich structures

โœ Scribed by Dr. M. Chandra Shekar; Dr. U. V. Subba Rao; Dr. V. Hari Babu

Publisher
John Wiley and Sons
Year
1984
Tongue
English
Weight
314 KB
Volume
19
Category
Article
ISSN
0232-1300

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โœฆ Synopsis

Samarium oxide films were preparod by vacuum thermal evaporation using tantalriin boats. The effect of aging, frequency and annealing on capacitance and tan 6 were studied for Al-Sm,O,-A1 capacitor structures. The variation in capacitance with frequency a t loufrequency region is quite considerable. The existence of oxygen vacancies were confirmed from the thermoliiminescence studies of these oxide films. The resuIt,s were discussed 011 the basis of oxygen vacancies existing in these films.

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