Dielectric Properties of thin insulating films of photoresist material : Joe T. Pierce and J. Paul Pritchard, Jr., Proc. IEEE Symposium on “Molecular Concepts in Microelectronics”, St. Louis, May 24, 25, 26 (1965), p. 3B-1

• Book ID: 113190392
• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 88 KB
• Volume: 5
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(66)90148-x