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Dielectric properties of Sb2O3 thin film capacitors

✍ Scribed by J.Siva Kumar; U.V.Subba Rao


Book ID
116017932
Publisher
Elsevier Science
Year
1990
Weight
321 KB
Volume
160
Category
Article
ISSN
0022-5088

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Thin films of several thicknesses in the form of MIM structures are prepared from the powders of tin oxide (SnO,) by thermal evaporation technique in a vacuum of Torr. The dielectric properties of tin oxide film capacitors have been studied with temperatures varying from 77 to 400 K and also with fr