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Dielectric properties of CVD grown SiON thin films on Si for MOS microelectronic devices

✍ Scribed by Konofaos, N; Evangelou, E K; Aslanoglou, X; Kokkoris, M; Vlastou, R


Book ID
111901132
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
127 KB
Volume
19
Category
Article
ISSN
0268-1242

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