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Dielectric properties of composition spread SiO2–Al2O3 mixed phase thin films deposited at room temperature by off-axis RF magnetron sputtering

✍ Scribed by Yun Hoe Kim; Dong Wook Shin; Jin Sang Kim; Jong-Han Song; Seok-Jin Yoon; Kyung Bong Park; Ji-Won Choi

Book ID: 113528881
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 738 KB
Volume: 38
Category: Article
ISSN: 0272-8842
DOI: 10.1016/j.ceramint.2011.04.054

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