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Dielectric properties of AlN film on Si substrate

✍ Scribed by Z. X. Bi; Y. D. Zheng; R. Zhang; S. L. Gu; X. Q. Xiu; L. L. Zhou; B. Shen; D. J. Chen; Y. Shi

Book ID: 111591041
Publisher: Springer US
Year: 2004
Tongue: English
Weight: 170 KB
Volume: 15
Category: Article
ISSN: 0957-4522
DOI: 10.1023/b:jmse.0000024233.82681.dc

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