Dielectric properties and auger electron spectroscopy on anodized thin-film capacitors of Ta-AI-N

✍ Scribed by Katsutaka Sasaki; Toshiji Umezawa

• Book ID: 112074689
• Publisher: John Wiley and Sons
• Year: 1983
• Tongue: English
• Weight: 490 KB
• Volume: 66
• Category: Article
• ISSN: 8756-6621
• DOI: 10.1002/ecja.4400660715