Electrical properties and Auger electron spectroscopy analysis of oxide layers formed by anodization on NbTa and NbTaN films

✍ Scribed by K. Sasaki; T. Umezawa

• Book ID: 107862845
• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 394 KB
• Volume: 74
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(80)90442-3