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Dielectric bismuth oxide films obtained by cathode reactive sputtering

โœ Scribed by V. V. Mokrousov

Book ID
112434858
Publisher
Springer
Year
1972
Tongue
English
Weight
178 KB
Volume
15
Category
Article
ISSN
1573-9228

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Thin films of titanium hydride were obtained by reactive cathodic sputtering with a titanium target using different compositions of a mixture of hydrogen and argon as sputtering gas. The layered material is quite different from the bulk material: only a poorly crystallized phase with formula Till,.