Dielectric and ferroelectric properties
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Z.T. Song; H.L.W. Chan; C.L. Choy; C.L. Lin
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Article
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2003
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Elsevier Science
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English
โ 140 KB
## Pb La Ti O (PLT10) thin film was prepared by an MOD process on ZrO / Si substrate. The studies 0.9 0.1 0.975 3 2 showed that the ZrO buffer layer with a thickness of 0.1 mm is not thermal stable and O atoms in O 2 2 atmosphere could diffuse into Si substrate through grain boundaries to form S