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Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

✍ Scribed by Feng Ma; Gang Li; Heqing Li; Hongtao Ma; Xun Cai

Book ID: 117357008
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 141 KB
Volume: 57
Category: Article
ISSN: 0167-577X
DOI: 10.1016/s0167-577x(02)00703-6

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