Adhesion improvement of TiN film on tool steel by a hybrid process of unbalanced magnetron sputtering and plasma-based ion implantation

Effects of nitrogen ion implantation and

Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

✍ Youming Liu; Liuhe Li; Ming Xu; Xun Cai; Qiulong Chen; Yawei Hu; Paul K. Chu 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 467 KB

The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum sample