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Diagnostic microstructures for the measurement of intrinsic strain in thin films

โœ Scribed by Guckel, H; Burns, D; Rutigliano, C; Lovell, E; Choi, B


Book ID
126901834
Publisher
Institute of Physics
Year
1992
Tongue
English
Weight
811 KB
Volume
2
Category
Article
ISSN
0960-1317

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