Developments in 2D AFM metrology: Nyyssonen, D. SPIE — Integrated Circuit Metrology, Inspection, and Process Control VII; 1993 Mar 2; San Jose, CA. Bellingham, WA: Society of Photo-Optical Instrumentation Engineers; 1993: 324–335

• Book ID: 111710884
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 130 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90143-0