Applications of an atomic force metrology system in semiconductor manufacturing: Beacham, J.; Dumesnil, F.; VanDevender, B. L. SPIE — Integrated Circuit Metrology, Inspection, and Process Control VII; 1993 Mar 2; San Jose, CA. Bellingham, WA: Society of Photo-Optical Instrumentation Engineers; 1993; 311–321

• Book ID: 107889261
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 136 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90132-5