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Development of Wear Resistant Zirconium Oxide Thin Films on Stainless Steel Substrates

โœ Scribed by Then, I.K.; Mujahid, M.; Zhang, B.

Book ID
124050595
Publisher
Trans Tech Publications, Ltd.
Year
2005
Tongue
English
Weight
676 KB
Volume
475-479
Category
Article
ISSN
1662-9752

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The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel