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Development of size-selected cluster ion irradiation system

✍ Scribed by N. Toyoda; S. Houzumi; I. Yamada

No coin nor oath required. For personal study only.

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Cluster size dependence of sputtering yi

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New design and development of size-selec

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Irradiation of silicon surface by Ar clu

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Cluster size dependences of bombardment

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Development of pure O2 cluster ion beam

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