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New design and development of size-selected gas cluster SIMS

✍ Scribed by Kousuke Moritani; Michihiro Hashinokuchi; Gen Mukai; Kozo Mochiji

Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 923 KB
Volume: 176
Category: Article
ISSN: 0424-7760
DOI: 10.1002/eej.21159

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