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Development of on-chip vacuum generation by gas–liquid phase transition

✍ Scribed by Kiyotaka Sugiyama; Yoshiaki Ukita; Yuzuru Takamura

Book ID: 113905129
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 494 KB
Volume: 176
Category: Article
ISSN: 0924-4247
DOI: 10.1016/j.sna.2011.12.003

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