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Development of a sub-micron ion beam system in the keV range

โœ Scribed by Y. Ishii; A. Isoya; K. Arakawa; T. Kojima; R. Tanaka

Book ID
114164864
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
167 KB
Volume
181
Category
Article
ISSN
0168-583X

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A system for ion beam tomography has been implemented in conjunction with the new sub-micron beamline at the Lund Nuclear Microprobe laboratory. The first version of the system is dedicated to STIM (scanning transmission ion microscopy) tomography for three-dimensional mass density analysis, but fut