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Development of a microtomography system at the Lund sub-micron beamline

✍ Scribed by M. Wegdén; M. Elfman; P. Kristiansson; N. Arteaga Marrero; V. Auzelyte; K.G. Malmqvist; C. Nilsson; J. Pallon

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
261 KB
Volume
249
Category
Article
ISSN
0168-583X

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✦ Synopsis

A system for ion beam tomography has been implemented in conjunction with the new sub-micron beamline at the Lund Nuclear Microprobe laboratory. The first version of the system is dedicated to STIM (scanning transmission ion microscopy) tomography for three-dimensional mass density analysis, but future development will allow also PIXE (particle induced X-ray emission) tomography for elemental analysis of micrometer-sized samples. The PIXE tomography will gain from the 8-element large area HPGe X-ray detector (100 mm 2 for each element) at the low beam currents inherited with a sub-micrometer beam spot size.

In this work, the first results are presented together with a detailed description of the developed system, including computer control of the sample rotation. The reconstruction technique, as well as potential tomography applications is briefly discussed.

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