๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Development of a new type of self-scanned electron image sensing integrated circuit

โœ Scribed by Hatfield, J.V.; York, T.A.; Comer, J.; Hicks, P.J.


Book ID
119774139
Publisher
IEEE
Year
1989
Tongue
English
Weight
850 KB
Volume
24
Category
Article
ISSN
0018-9200

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A new coaxial detection system for backscattered electrons in SEM is described. This coaxial detection system allows us to collect only the backscattered electrons that have lost a small percentage of the primary energy, emerging from the sample surface with a take-off angle defined by the objective