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Development of a multi-electron-beam source for sub-10 nm electron beam induced deposition

✍ Scribed by van Bruggen, M. J.; van Someren, B.; Kruit, P.

Book ID: 125450863
Publisher: AVS (American Vacuum Society)
Year: 2005
Tongue: English
Weight: 637 KB
Volume: 23
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.2091087

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