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Deuterium diffusion into plasma-deposited silicon oxynitride films

✍ Scribed by W.M. Arnoldbik; C.H.M. Marée; F.H.P.M. Habraken

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 896 KB
Volume: 74
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90105-8

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