โ Scribed by Harland G. Tompkins
No coin nor oath required. For personal study only.
In this work we show how to use ellipsometry to measure the thickness of TiW when the film thickness is โค250 ร . Because the stoichiometry and microstructure of TiW depends strongly on the deposition parameters, the optical constants of TiW deposited in two different systems will not in general be the same. Accordingly, the optical constants of the film material are often not known. We show that the method is robust if a reasonable approximation to the optical constants is available, and we show how to obtain such an approximation. Auger electron spectroscopy is used to substantiate the conclusions.
๐ SIMILAR VOLUMES
In order to determine the thickness of thin lipid films from their reflectivity, it has previously been necessary to make assumptions concerning the refractive index variation within the film. In this communication, a method is derived for determining the thickness of films in water which is indepen