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Determination of the Thickness of Silazane-Based SiOx Coatings in the Submicrometer Range by Near-Infrared Reflection Spectroscopy

✍ Scribed by Scherzer, Tom; Mirschel, Gabriele; Heymann, Katja; Prager, Lutz; Buchmeiser, Michael R.

No coin nor oath required. For personal study only.

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