✦ LIBER ✦

Determination of the range profiles of boron implanted into Si and SiO2

✍ Scribed by Rybka, V. ;Hnatowicz, V. ;Kvítek, J. ;Vacík, J. ;Schmidt, B.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Simulation of range profiles for boron i

✍ M. Posselt; T. Feudel; G. Thäter 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 387 KB

Damage and range profiles of lithium imp

✍ J.P. Biersack; D. Fink 📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 483 KB

Description of arsenic and boron profile

✍ F. Jahnel; H. Ryssel; G. Prinke; K. Hoffmann; K. Müller; J. Biersack; R. Henkelm 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 396 KB

Influence of Preamorphization on Concent

✍ Barcz, A. ;Rosinski, W. ;Turos, A. ;Wielunski, L. ;Wojtowicz-Natanson, B. 📂 Article 📅 1975 🏛 John Wiley and Sons 🌐 English ⚖ 150 KB

Range profiles and thermal release of he

✍ J.P. Biersack; D. Fink; R.A. Henkelmann; K. Müller 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 676 KB

The Si/SiO2 interface trap density in bo

✍ S. Peterström 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 490 KB