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Determination of the lateral resolution of electron-beam testers and quantification of measurement errors

✍ Scribed by J. Kölzer; H. Richter; S. Dombrowski

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
633 KB
Volume
16
Category
Article
ISSN
0167-9317

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High resolution measurement of the therm
High resolution measurement of the thermal expansion coefficient of semiconductor multilayer lateral nanostructures
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## Abstract We measured the thermal expansion coefficient (TEC) of a vertically stacked multi‐quantum‐well (MQW) structure buried under a thick GaAs top layer before and after lateral patterning of the GaAs top layer. After patterning the TEC of the whole MQW structure differs from that of the plan