✦ LIBER ✦
Evaluation, verification and error determination of proximity parameters α, β and ν in electron beam lithography
✍ Scribed by S.V. Dubonos; B.N. Gaifullin; H.F. Raith; A.A. Svintsov; S.I. Zaitsev
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 380 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
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