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Determination of the hardness and elastic modulus of low-k thin films and their barrier layer for microelectronic applications

โœ Scribed by Lu Shen; Kaiyang Zeng; Yihua Wang; Babu Narayanan; Rakesh Kumar

Book ID
108411332
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
830 KB
Volume
70
Category
Article
ISSN
0167-9317

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