✦ LIBER ✦
Design and preparation of porous polybenzoxazole films using the tert-butoxycarbonyl group as a pore generator and their application for patternable low-k materials
✍ Scribed by Fukumaru, Takahiro ;Fujigaya, Tsuyohiko ;Nakashima, Naotoshi
- Book ID
- 120412972
- Publisher
- The Royal Society of Chemistry
- Year
- 2012
- Tongue
- English
- Weight
- 958 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1759-9954
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