✦ LIBER ✦
Mechanical properties and fracture toughness of organo-silicate glass (OSG) low-kdielectric thin films for microelectronic applications
✍ Scribed by J.B. Vella; I.S. Adhihetty; K. Junker; A.A. Volinsky
- Book ID
- 111546468
- Publisher
- Springer Netherlands
- Year
- 2003
- Tongue
- English
- Weight
- 328 KB
- Volume
- 119/120
- Category
- Article
- ISSN
- 1573-2673
No coin nor oath required. For personal study only.