๐”– Bobbio Scriptorium
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Determination of the centroid depths of the depth profiles of ion-implanted analytes by angle-resolved electron microbeam analysis

โœ Scribed by W. H. Gries; W. Koschig

Book ID
104592638
Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
346 KB
Volume
16
Category
Article
ISSN
0142-2421

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โœฆ Synopsis

Abstract

Angleโ€resolved signal ratio electron microbeam analysis (AR/SR/EMA) was applied for the determination of the centroid depth of the ionโ€implanted depth profile of 100 keV 10^16^ cm^โˆ’2^ P in Si. The experiment is part of an investigation on the suitability of AR/SR/EMA for application in the (nonโ€destructive) calibration of ionโ€implanted reference materials.

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