Determination of the angle of incidence in a Cameca IMS-4f SIMS instrument
โ Scribed by M. Meuris; P. De Bisschop; J. F. Leclair; W. Vandervorst
- Book ID
- 104592380
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 474 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0142-2421
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๐ SIMILAR VOLUMES
Kinetic energy distributions of the secondary ions and scattered ions of O', Cs' and Ar' (bombardment with primary ions of O-, C s 'and Ar' was utilized) were obtained from the elemental surfaces of Mg, Al, Si, Ag O 2 ', and Pb using a modiรed Cameca IMS-3f magnetic sector mass spectrometer. In addi
A novel approach for the determination of the incidence angle in a magnetic-sector SIMS instrument is described. It is based on accurate mapping of the primary beam in the extraction รeld near the sample surface. The accuracy of the method and the applicability of simple formulas are discussed in de