✦ LIBER ✦
A SIMS study of the altered layer in Si using 18O2 primaries at various angles of incidence
✍ Scribed by G.P. Beyer; S.B. Patel; J.A. Kilner
- Book ID
- 113285847
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 453 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0168-583X
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