Identification of LEIS contributions observed in the ion kinetic energy distributions collected on a cameca IMS-3f SIMS instrument
✍ Scribed by Franzreb, Klaus; Pratt, Allen; Splinter, Steven; van der Heide, Paul
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 317 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Kinetic energy distributions of the secondary ions and scattered ions of O', Cs' and Ar' (bombardment with primary ions of O-, C s 'and Ar' was utilized) were obtained from the elemental surfaces of Mg, Al, Si, Ag O 2 ', and Pb using a modiÐed Cameca IMS-3f magnetic sector mass spectrometer. In addition, the distributions of O' were acquired for ion surface bombardment of several standard reference materials (Ti-base alloys of O 2 ' SRM648 and SRM649) and geological samples [ pyrrhotite and arsenopyrite (FeAsS) ] . Distinct fea-(Fe (1-x)
S) tures attributable to elastic binary projectile/target backscattering collisions were found to be superimposed in the data. Hence, a full characterization of these kinetic ion energy distributions could be made. As a result it is possible to identify both the secondary ion and scattered ion contributions present in the collected kinetic energy distributions and to perform low-energy primary ion surface scattering (LEIS) experiments combined with in situ secondary ion mass spectrometry (SIMS) analysis, albeit to a reduced sensitivity and resolution compared to those possible on dedicated LEIS instruments.