✦ LIBER ✦

Determination of Stresses in SiSiO2 and Mechanically Affected Si by EPR

✍ Scribed by W. Gehlhoff; K. H. Segsa

Publisher: John Wiley and Sons
Year: 1983
Tongue: English
Weight: 747 KB
Volume: 118
Category: Article
ISSN: 0370-1972
DOI: 10.1002/pssb.2221180227

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✦ Synopsis

Abstract

The influence of stresses generated by roughening or oxidation of silicon samples on the EPR spectra of Fe^0^ in silicon is investigated. Starting from previous calculations it is possible to explain the changes in the angular dependence of the spectra, and to determine the stress components in the SiO~2~ film and in the Si surface affected by roughening. The stress values determined by the EPR analysis are compared with the results obtained by other methods.

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