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Determination of oxygen and nitrogen in tantalum thin films by nuclear techniques and Auger spectroscopy

✍ Scribed by G. Della Mea; P. Baeri; S.U. Campisano; M. Cocito


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
228 KB
Volume
51
Category
Article
ISSN
0040-6090

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