Determination of impurity distribution profiles in silicon epitaxial wafers : F. S. Kovacs and A. S. Epstein. SCP and Solid State Technol., August, 32 (1964)

• Book ID: 113190043
• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 94 KB
• Volume: 4
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(65)90049-1