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Determination of doping concentration and interface charges for thin film SOI MOSFETs

✍ Scribed by Sung-Kye Park; Choong-Ki Kim


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
535 KB
Volume
36
Category
Article
ISSN
0038-1101

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Evidence for the rate determining step a
✍ A. Damjanovic; L-S.R. Yeh; J.F. Wolf πŸ“‚ Article πŸ“… 1981 πŸ› Elsevier Science 🌐 English βš– 261 KB

The rates of growth of anodic oxide films at PI m acid and alkahna solutions and Ni III alkaline solutibns are compared. In acid solutions, the rates are pH independent. In alkaline solutions. they are affected by pH. The exchange current densities, i,, in alkaline solutions increase one decade as p