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Determination of diffusion, partition and sticking coefficients for boron, phosphorus and antimony in silicon

✍ Scribed by R.J. Bennett; C. Parish

Publisher: Elsevier Science
Year: 1975
Tongue: English
Weight: 518 KB
Volume: 18
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(75)90003-9

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