Determination of diffusion, partition and sticking coefficients for boron, phosphorus and antimony in silicon : R. J. Bennett and C. Parish. Solid State Electronics18, 833 (1975)

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 139 KB
• Volume: 15
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(76)90111-6