Determination of boron and phosphorus in borophosphosilicate thin films on silicon substrates by capillary electrophoresis

✍ Scribed by Carpio, Ronald A.; Mariscal, Rene; Welch, John

• Book ID: 127005982
• Publisher: American Chemical Society
• Year: 1992
• Tongue: English
• Weight: 857 KB
• Volume: 64
• Category: Article
• ISSN: 0003-2700
• DOI: 10.1021/ac00042a017