Determination and Study of Field Dependent Defect Density in Thermal SiO2 Using 1,1,1 Trichloroethane (TCA)
β Scribed by Bhan, R. K. ;Lomash, S. K. ;Chhabra, K. C.
- Publisher
- John Wiley and Sons
- Year
- 1990
- Tongue
- English
- Weight
- 617 KB
- Volume
- 117
- Category
- Article
- ISSN
- 0031-8965
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