✦ LIBER ✦
Study of defects in thermal SiO2 grown in the presence of 1,1,1-trichloroethane by Wright etchant : R. K. Bhan. Microelectron. J.22(3), 17 (1991)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 130 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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