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Detailed modeling of three-dimensional chemical vapor deposition

✍ Scribed by Alexandre Ern; Vincent Giovangigli; Mitchell D. Smooke

Book ID: 108342548
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 614 KB
Volume: 180
Category: Article
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(97)00311-4

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